Skip to main content Accessibility help
×
Home
Hostname: page-component-559fc8cf4f-67gxp Total loading time: 0.306 Render date: 2021-03-06T15:56:47.084Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

The study of pulsed laser deposited films from a pressed, sintered, W–C mixture at two different fluences

Published online by Cambridge University Press:  31 January 2011

Smita Ghaisas
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
R.D. Vispute
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
S.B. Ogale
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
S.M. Choudhari
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
S.M. Kanetkar
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
S.K. Kulkarni
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
S. Mahamuni
Affiliation:
Department of Physics, University of Poona, Pune 411007 India
S. Badrinarayan
Affiliation:
National Chemical Laboratory, Pune, India
S.V. Ghaisas
Affiliation:
Department of Electronic Science, University of Poona, Pune 411007 India
Get access

Abstract

The reactive aspect of pulsed laser induced vaporization has been explored via synthesis of tungsten carbide films from an unreacted sintered mixture of the W–C system. Using low-angle x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS), it is shown that stoichiometry and the extent of chemical compound formation in the deposited films depend upon the laser fluence. Two cases with energy density 20 J/cm2 and 40 J/cm2 are discussed and compared. An attempt has been made to illustrate the mechanism behind the reactive aspect of the deposition.

Type
Articles
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below.

References

1Berti, M., Rose, L. F. Dona dalle, Drigo, A. V., Cohen, C., Siejka, J., Bentini, G. G., and Jenniti, E., Phys. Rev. B 43, 2346 (1988).Google Scholar
2Beech, F. and Boyd, I. W., in Photochemical Processing of Electronic Materials, edited by Boyd, I. W. and Jackman, R. B. (Academic Press, New York, 1990) pp. 387429.Google Scholar
3Dijkkamp, D., Venkatesan, T., Wu, X. D., Shaheen, S. A., Jiraswi, M., Minlee, Y. H., Mclean, W. L., and Craft, M., Appl. Phys. Lett. 51, 619 (1987).CrossRefGoogle Scholar
4Wu, X. D., Dijkkamp, D., Ogale, S. B., Inam, A., Chase, E. W., Miceli, T. F., Chang, C. C., Tarascon, J. M., and Venkatesan, T., Appl. Phys. Lett. 51, 861 (1987).Google Scholar
5Ogale, S. B., Dijkkamp, D., Venkatesan, T., Wu, X. D., and Inam, A., Phys. Rev. B 36, 7210 (1987).CrossRefGoogle Scholar
6Vispute, R. D., Godbole, V. P., Choudhari, S. M., Kanetkar, S. M., and Ogale, S.B., J. Mater. Res. 3, 1180 (1988).CrossRefGoogle Scholar
7Sato, T., Furuno, S., Iguchi, S., and Hanabusa, M., Jpn. J. Appl. Phys. 26, L1487 (1987).Google Scholar
8Hansen, S. G. and Robitille, T. E., Appl. Phys. Lett. 52, 81 (1988).CrossRefGoogle Scholar
9Goodall, F. and Lawes, R. A., Microelectronic Engin. 6, 61 (1987).CrossRefGoogle Scholar
10This MOSFIT code was developed by E. Kreber of Universite des Saarlandes, Sarbriicken, and it was adapted for an ICL 119045 computer by S.K. Date, National Chemical Laboratories, Pune, India.Google Scholar
11Wagner, C.D., Riggs, W.M., Davies, L.E., and Moulder, J.F., in Handbook of X-ray Photoelectron Spectroscopy, edited by Muilenberg, G. E. (Perkin-Elmer Corporation, Eden Prairie, MN, 1979).Google Scholar
12The Refractory Carbides, 2, edited by Storms, E. K. (Academic Press, New York, 1967), p. 143.Google Scholar
13American Institute Physics Handbook, edited by Gray, D.E. (McGraw-Hill, New York, 1972).Google Scholar
14Yang, H. Y. and Zhao, X. A., J. Vac. Sci. Technol. A 6, 1646 (1988).Google Scholar
15Ghaisas, S., Choudhari, S. M., Kanetkar, S. M., Ghaisas, S. V., and Kulkarni, V.N., J. Appl. Phys. 64, 4782 (1988).CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 7 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 6th March 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

The study of pulsed laser deposited films from a pressed, sintered, W–C mixture at two different fluences
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

The study of pulsed laser deposited films from a pressed, sintered, W–C mixture at two different fluences
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

The study of pulsed laser deposited films from a pressed, sintered, W–C mixture at two different fluences
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *