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High-frequency monolithic thin-film piezoelectric-on-substrate filters

Published online by Cambridge University Press:  13 March 2009

Reza Abdolvand  and
Farrokh Ayazi
Reza Abdolvand*
Affiliation:
School of Electrical and Computer Engineering, Oklahoma State University, Stillwater, OK 74078, USA. Phone: +1 4057445251.
Farrokh Ayazi
Affiliation:
School of Electrical and Computer Engineering, Georgia Institute of Technology, USA. Phone: +1 4048949496.
*
Corresponding author: R. Abdolvand E-mail: reza.abdolvand@okstate.edu
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Abstract

A class of micromachined acoustic filters is presented in which the number of individual resonant structures is reduced to 1 (monolithic filter). This resonant structure is comprised of a stack of thin-film piezoelectric-on-silicon. Symmetric and anti-symmetric resonance modes (dual modes) of the silicon structure are piezoelectrically excited and coupled to realize a 2-pole narrowband filter. High-order lateral bulk acoustic resonance modes of a rectangular plate are utilized to design dispersed-frequency UHF filters fabricated on a single substrate. Thickness mode filters are also realized at GHz frequencies using a new interdigitated electrode design. Additionally, it is shown that the filter bandwidth can be controlled by changing the dimensions of the resonant structure and the electrode pattern. Narrowband lateral mode filters with filter Q’s larger than 300 at ~440 MHz and thickness mode filters with filter Q’s in the range of 150–900 at ~3.1 GHz are demonstrated.

Keywords

Thin-film piezoelectricMonolithic filterNarrowband filterFilter Q
Type
Original Article
Information
International Journal of Microwave and Wireless Technologies , Volume 1 , Issue 1 , February 2009 , pp. 29 - 35
Copyright
Copyright © Cambridge University Press and the European Microwave Association 2009

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