Double crystal diffractometer measurements on silicon bombarded to a fluence >1016 ions/cm2 with 1 MeV deuterium and 2 MeV nitrogen are reported. Such measurements provide insight into radiation damage in silicon through the observation of Bragg case pendelloesung fringes and double peak rocking curves. Bragg case pendelloesung fringes are used to determine nondestructively the projected range of ions in silicon. Double peak rocking curves are used to measure changes in lattice parameter with the ion dose. Finally, a model of radiation damage in silicon is presented.

Recent advances in MOS integrated circuit technology have opened new, high-volume applications utilizing epitaxial silicon-on- insulating substrates. To provide good quality heteroepitaxial silicon films for the semiconductor industry, a development program has been established to improve both the crystalline quality and the fabrication techniques for the most promising current substrate, magnesium aluminum spinel.

The role of X-ray diffraction techniques in the investigation of crystal quality, substrate surface quality, and epitaxial film quality are discussed, and results interpreted as the program is traced from crystal growth to epitaxial film analysis.

Previous work on modification of the collagen lattice, presented at these meetings, has served to confirm the Ramachandran proposal for the structure of this important protein, together with information on the lengths and tensile strengths of these bonds, including hydrogen bonds, hydrophobe bonds, and Vander Waals attractions. Rat tail tendons were suspended in 2 M aqueous solutions of dimethylsulfoxide, acetone, trimethylamineoxide and 1,4-cyclohexanedione, all of which showed evidence of ligation by expansion of the collagen lattice and refinement of the 100 spot in the x-ray diffraction pattern run by rotation on the collagen fiber axis. In the case of trimethylamineoxide and cyclohexanedione, oriented crystallization also occurred, with the long direction of the molecule in the plane perpendicular to the fiber axis of collagen. With the monofunctional ligands, the -C=0 group forms a hydrogen bond to the N-H group in the Ramachandran standard revised model, leaving the methyl groups to form the hydrophobe bond.

The effect of resin particles on copper x-ray fluorescence was studied. For any given resin size the relationship between copper concentration and x-ray intensity was linear. As the particle size decreased, the x-ray intensity increased for any given copper concentration. The general shape of the curves are similar to the ones predicted by Bernstein for a minor constituent in a power sample. This study indicates that the variation in intensity with particle size can be eliminated by using resins with a mean particle diameter of 56 microns or less.

Aluminum film conducting stripes are widely used for semiconductor device interconnection networks. The addition of a low percentage of copper significantly increases their life. Composition must be controlled to maintain product quality.

The paper discusses various methods used to analyze the copper composition in the aluminum films, and adaptation of one of these methods for process control application. A portable instrument designed for field use was adapted for use as an on-line instrument.

Oxy-acetylene flame heating has been employed with an ordinary Nonius Weissenberg camera for high-temperature single-crystal studies over the the range 1000-3000°C. The regulator blow pipe is mounted horizontally on the camera track and one end of the experimental crystal (1 cm long) is heated by the vertical flame issuing out of a 0.5 mm bore nozzle* A long slot cut at the top of the film-cassette allows the flame to escape out without touching the X-ray film. The film-cassette consists of two split-halves hinged on one side so that it can be opened and slipped over the screen tubes. This arrangement avoids the necessity for removing the flame each time a new film is mounted on the camera. The goniometer arcs can be positioned during high-temperature exposures, and there is no need to water-cool the cassette up to the highest temperature. The device has been used to take photographs of MgO single crystals at 2100°C. It permits a ready application to diffractometers based on Weissenberg geometry.