Book contents
- Frontmatter
- Contents
- Preface
- 1 Fundamentals of laser energy absorption
- 2 Lasers and optics
- 3 Thermal processes in laser–materials interactions
- 4 Desorption at low laser energy densities
- 5 Dynamics of laser ablation
- 6 Ultrafast-laser interactions with materials
- 7 Laser processing of thin semiconductor films
- 8 Laser-induced surface modification
- 9 Laser processing of organic materials
- 10 Pulsed-laser interaction with liquids
- 11 Laser cleaning of particulate contaminants
- 12 Laser interactions with nanoparticles
- 13 Laser-assisted microprocessing
- 14 Nano-structuring using pulsed laser radiation
- Index
- References
1 - Fundamentals of laser energy absorption
Published online by Cambridge University Press: 04 December 2009
Book contents
- Frontmatter
- Contents
- Preface
- 1 Fundamentals of laser energy absorption
- 2 Lasers and optics
- 3 Thermal processes in laser–materials interactions
- 4 Desorption at low laser energy densities
- 5 Dynamics of laser ablation
- 6 Ultrafast-laser interactions with materials
- 7 Laser processing of thin semiconductor films
- 8 Laser-induced surface modification
- 9 Laser processing of organic materials
- 10 Pulsed-laser interaction with liquids
- 11 Laser cleaning of particulate contaminants
- 12 Laser interactions with nanoparticles
- 13 Laser-assisted microprocessing
- 14 Nano-structuring using pulsed laser radiation
- Index
- References
Summary
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- Information
- Transport in Laser MicrofabricationFundamentals and Applications, pp. 1 - 32Publisher: Cambridge University PressPrint publication year: 2009
References
, and , 1999, Principles of Optics, 7th edn, Cambridge, Cambridge University Press.CrossRefGoogle Scholar
, and , 1983, “Optical Functions of Silicon between 1.7 and 4.7 eV at Elevated Temperatures,” Phys. Rev. B, 27, 7466–7472.CrossRefGoogle Scholar
, , , and , 1958, “Fine Structure in the Absorption-Edge Spectrum of Si,” Phys. Rev., 111, 1245–1254.CrossRefGoogle Scholar
, , , and , 1985, “Optical Characterization of Polycrystalline Silicon Films before and after Oxidation,” Thin Solid Films, 125, 235–241.CrossRefGoogle Scholar
, , , and , 2000, “Interpretation of Optical Diagnostics for the Analysis of Laser Crystallization of Amorphous Silicon Films,” Micro. Therm. Eng., 4, 25–38.Google Scholar
, 1985, Handbook of Optical Constants of Materials, Vols. I and II, London, Academic Press.Google Scholar
, , and , 1974, “Optical Properties of Liquid Silicon,” Fiz. Tverd. Tela, 16, 3246–3248.Google Scholar
, , and , 1997, “Spectral Optical Functions of Silicon in the Range of 1.13 to 4.96 eV at Elevated Temperatures,” Int. J. Heat Mass Transfer, 40, 1591–1600.CrossRefGoogle Scholar
, 1975, “Standard Thermodynamic Functions for Formation of Electrons and Holes in Si, GaAs and GaP,” J. Electrochem. Soc., 122, 1133.CrossRefGoogle Scholar