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13 - Industry roadmap for RF MEMS

Published online by Cambridge University Press:  05 February 2014

Jérémie Bouchaud
Affiliation:
Wicht Technologie Consulting (WTC)
Roberto Sorrentino
Affiliation:
University of Perugia
Bernardo Knoblich
Affiliation:
Wicht Technologie Consulting (WTC)
Harrie A. C. Tilmans
Affiliation:
Interuniversity Microelectronics Center (IMEC)
Fabio Coccetti
Affiliation:
Centre National de la Recherche Scientifique - Laboratoire d’Analyse et d’Architecture des Systèmes (CNRS-LAAS)
Stepan Lucyszyn
Affiliation:
Imperial College of Science, Technology and Medicine, London
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Summary

Introduction

This chapter aims at provide a medium-term perspective for the future developments of RF MEMS technology up to 2020. This work is essentially based on the final report delivered by the EU-funded FP6 project Applied Research Roadmap for RF Micro/nano Systems Opportunities (ARRRO), a Coordinated Action whose aim was “to assess the current status and develop a vision of the future requirements for RF MEMS and RF NEMS technology, products and applications”. The roadmap described here is uniquely based on approximately 80 interviews with industrial companies (either developing or assessing the potential use of RF MEMS). Unlike other studies, which are based on data gained from the open literature, the findings presented here paint a more realistic future roadmap, from an industrial perspective.

Unlike ARRRO's report, which essentially refers to RF MEMS in the broad sense of RF microsystems technology (MST), only RF MEMS devices with movable parts are considered here. Having said this, reference is occasionally made to fixed micromachined devices (e.g. inductors), BAW and micromechanical resonators. With this in mind, a comprehensive roadmap in graphical form for RF MST components is shown in Fig. 13.1.

Type
Chapter
Information
Advanced RF MEMS , pp. 359 - 403
Publisher: Cambridge University Press
Print publication year: 2010

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References

Zhou, S., Sun, X. Q. and Carr, W. N., “A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation”, J. Micromech. Microeng., vol. 9, pp. 45–50, 1999CrossRefGoogle Scholar
Tassetti, C. M., Lissorgues, G. and Gilles, J. P., “New tunable RF MEMS microinductors Design”, J. Micromech. Microeng., vol. 14, pp. S17–S22, 2004CrossRefGoogle Scholar
Zine-El-Abidine, I., Okoniewski, M. and McRory, J. G., “A MEMS tunable inductor”. NSTI Nanotechnology Conference (Nanotech 2004), Boston, MA, vol. 1, pp. 340–2, Mar. 2004Google Scholar
Zine-El-Abidine, I., Okoniewski, M. and McRory, J. G., “RF MEMS tunable inductor using bimorph microactuators”, Proceedings 2005 IEEE International Conference on MEMS, NANO and Smart Systems (ICMENS’05), pp. 436–7, Jul. 2005
Bordas, C., Grenier, K., Dubuc, D., Flahaut, E., Pacchini, S., Paillard, M. and J-Cazaux, L., “Carbon nanotube based dielectric for enhanced RF MEMS reliability”, IEEE MTT-S Int. Microw. Symp. Dig., pp. 375–8, Jun. 2007
Gammel, P., Fisher, G. and Bouchaud, J., “RF MEMS and NEMS technology, devices and applications”, Bell Labs Tech. J., vol. 10, no. 3, pp. 29–59, 2005CrossRefGoogle Scholar
Benini, L., Farella, E. and Guiducci, C., “Wireless sensor networks: Enabling technology for ambient intelligence”, Microelectron. J., vol. 37, pp. 1639–49, 2006CrossRefGoogle Scholar
Haroun, I., Lambadaris, I. and Hafez, R., “Building wireless sensor networks”, Microwaves & RF, pp. 78–84, Sep. 2005
Otis, B., Chee, Y. H. and Rabaey, J., “A 400 μW-RX, 1.6 mW-TX super-regenerative transceiver for wireless sensor networks”, Proc. IEEE International Solid-State Circuits Conference, vol. 1, pp. 396–8, 2005Google Scholar
US Department of Defence, Warfighter Information Network-Tactical (WIN-T) program
Pursula, P., Vähä-Heikkilä, T., Müller, A., Neculoiu, D., Konstantinidis, G., Oja, A. and Tuovinen, J., “Millimeter-wave identification – a new short-range radio system for low-power high data-rate applications”, IEEE Trans. Microw. Theory Tech., vol. 56, no. 10, pp. 2221–8, Oct. 2008CrossRefGoogle Scholar
Müller, A., Neculoiu, D., Pursula, P., Vähä-Heikkilä, T., Giacomozzi, F. and Tuovinen, J., “Hybrid integrated micromachined receiver for 77 GHz millimeter wave identification systems”, European Microwave Conference (EuMC 2007), Munchen, Germany, pp. 1034–7, Oct. 2007CrossRefGoogle Scholar
Schoebel, J., Buck, T., Reimann, M., Ulm, M., Schneider, M., Jourdain, A., Carchon, G. J., and Tilmans, H. A. C., “Design considerations and technology assessment of phased – array antenna systems with RF MEMS for automotive radar applications”, IEEE Trans. Microw. Theory Tech., vol. 53, no. 6, pp. 1968–75, Jun. 2005CrossRefGoogle Scholar
Cazaux, J.-L., Vendier, O., Di, S. Nardo, Drevon, C. and Feudale, M. “Perspectives for RF MEMS at Thales Alenia Space”, Industrial Workshop at MEMSWAVE 2007, Barcelona, Spain, pp. 1–39, Jun. 2007Google Scholar

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