1 results
Application of Multivariate Statistical Analysis to STEM X-ray Spectral Images: Interfacial Analysis in Microelectronics
-
- Journal:
- Microscopy and Microanalysis / Volume 12 / Issue 6 / December 2006
- Published online by Cambridge University Press:
- 11 October 2006, pp. 538-544
- Print publication:
- December 2006
-
- Article
- Export citation