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Application of Multivariate Statistical Analysis to STEM X-ray Spectral Images: Interfacial Analysis in Microelectronics

Published online by Cambridge University Press:  11 October 2006

Paul G. Kotula  and
Michael R. Keenan
Paul G. Kotula
Affiliation:
Materials Characterization Department, Sandia National Laboratories, P.O. Box 5800, MS 0886, Albuquerque, NM 87185-0886, USA
Michael R. Keenan
Affiliation:
Materials Characterization Department, Sandia National Laboratories, P.O. Box 5800, MS 0886, Albuquerque, NM 87185-0886, USA
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Abstract

Multivariate statistical analysis methods have been applied to scanning transmission electron microscopy (STEM) energy-dispersive X-ray spectral images. The particular application of the multivariate curve resolution (MCR) technique provides a high spectral contrast view of the raw spectral image. The power of this approach is demonstrated with a microelectronics failure analysis. Specifically, an unexpected component describing a chemical contaminant was found, as well as a component consistent with a foil thickness change associated with the focused ion beam specimen preparation process. The MCR solution is compared with a conventional analysis of the same spectral image data set.

Keywords

STEMX-ray microanalysisspectral imagingmultivariate statistical analysismultivariate curve resolutionsubpixel spectral deconvolution
Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue 6: Special Issue: Frontiers of Electron Microscopy in Materials Science , December 2006 , pp. 538 - 544
Copyright
© 2006 Microscopy Society of America

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References

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