A thermodynamic and experimental study of in-situ chlorination of tungsten is presented. When gaseous tungsten chlorides are used as metal precursors for tungsten and tungsten silicide CVD, their direct synthesis provide a reproductible volatile chloride source.
The conditions leading to the best production of volatile tungsten chlorides have been optimized by means of thermodynamic calculations. The influence of the different production parameters (temperature, nature of reactant gas, …) have been determined.
During some chlorination experiments, volatile chlorides have been detected in-situ by a quadrupole mass spectrometer.
Good agreement between theoretical and experimental results is obtained.