4 results
A Simple Lateral Grain Growth of Poly-Si by Single Excimer Laser Crystallization of Amorphous Silicon Film Deposited on Polygon Shaped Trench
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- Journal:
- MRS Online Proceedings Library Archive / Volume 762 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A17.12
- Print publication:
- 2003
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2-Dimensional Controlled Large Lateral Grain Growth on the Floating Amorphous Silicon Film by Excimer Laser Recrystallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 762 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A17.9
- Print publication:
- 2003
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Ultra-Low Temperature Poly-Si Thin Film by Excimer Laser Recrystallization For Flexible Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 769 / 2003
- Published online by Cambridge University Press:
- 15 February 2011, H2.3
- Print publication:
- 2003
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The Characteristics of Silicon Dioxide Deposited by Inductively Coupled Plasma Chemical Vapor Deposition at 150°C
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- Journal:
- MRS Online Proceedings Library Archive / Volume 769 / 2003
- Published online by Cambridge University Press:
- 15 February 2011, H6.18
- Print publication:
- 2003
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