9 results
MANOS erase performance dependence on nitrogen annealing conditions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1729 / 2015
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- 03 March 2015, pp. 15-20
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- 2015
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Novel materials by atomic layer deposition and molecular layer deposition
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- Journal:
- MRS Bulletin / Volume 36 / Issue 11 / November 2011
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- 18 November 2011, pp. 877-884
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- November 2011
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Charge Trapping Memories With Atomic Layer Deposited High-k Dielectrics Capping Layers
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- MRS Online Proceedings Library Archive / Volume 1250 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1250-G07-03
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- 2010
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Atomic layer deposition of noble metals: Exploration of the low limit of the deposition temperature
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- Journal of Materials Research / Volume 19 / Issue 11 / November 2004
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- 01 November 2004, pp. 3353-3358
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- November 2004
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Liquid injection MOCVD and ALD studies of “single source” Sr-Nb and Sr-Ta precursors
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- MRS Online Proceedings Library Archive / Volume 784 / 2003
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- 01 February 2011, C4.1
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- 2003
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Atomic-Layer Deposition of ZrO2 Thin Films Using New Alkoxide Precursors
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- MRS Online Proceedings Library Archive / Volume 716 / 2002
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- 01 February 2011, B3.5
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- 2002
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Tert-butylamine and Allylamine as Reductive Nitrogen Sources in Atomic Layer Deposition of TaN Thin Films
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- Journal of Materials Research / Volume 17 / Issue 1 / January 2002
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- 31 January 2011, pp. 107-114
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- January 2002
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Atomic force microscopy studies of ZnS films grown on (100) GaAs by the successive ionic layer adsorption and reaction method
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- Journal:
- Journal of Materials Research / Volume 13 / Issue 6 / June 1998
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1688-1692
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- June 1998
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Ale Growth of Transparent Conductors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 426 / 1996
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- 10 February 2011, 513
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- 1996
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