Silicon is the dominating material for the fabrication of MEMS devices,
especially in high volume production. However, metals with their typical
properties are used to enhance or enable the functionality of MEMS. In
contrast to microelectronic technologies, not only the electrical but also
the mechanical and optical behavior of metals could be helpful. New
requirements in MEMS technologies demand optimized processes in
metallization for the fabrication of microstructures.
This paper presents some metallization applications and related technology
development in the field of MEMS.