8 results
Precession Electron Diffraction (PED) Strain Measurements in Stacked Nanosheet Structures
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- Journal:
- Microscopy and Microanalysis / Volume 25 / Issue S2 / August 2019
- Published online by Cambridge University Press:
- 05 August 2019, pp. 2018-2019
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- August 2019
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Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
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- Journal:
- Microscopy and Microanalysis / Volume 24 / Issue S1 / August 2018
- Published online by Cambridge University Press:
- 01 August 2018, pp. 8-9
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- August 2018
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Quantitative Electron Energy Loss Spectroscopy (EELS) Analysis of Flowable CVD Oxide for Shallow Trench Isolation of finFET Integration
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- Journal:
- Microscopy and Microanalysis / Volume 23 / Issue S1 / July 2017
- Published online by Cambridge University Press:
- 04 August 2017, pp. 1462-1463
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- July 2017
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Nanobeam Diffraction and Geometric Phase Analysis for Strain Measurements in Si/SiGe Nanosheet Structures
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- Journal:
- Microscopy and Microanalysis / Volume 22 / Issue S3 / July 2016
- Published online by Cambridge University Press:
- 25 July 2016, pp. 1528-1529
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- July 2016
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Elastic Relaxation of Strained Silicon on Insulator (sSOI) Fins: Nanobeam Diffraction (NBD) and Simulations
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- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 1967-1968
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- August 2015
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Strain Quantification Analysis of Epitaxial SiGe on SOI by Nanobeam Diffraction (NBD)
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- Journal:
- Microscopy and Microanalysis / Volume 20 / Issue S3 / August 2014
- Published online by Cambridge University Press:
- 27 August 2014, pp. 1070-1071
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- August 2014
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Electron Holography with Variable Magnification for Semiconductor Device Characterization
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- Journal:
- Microscopy and Microanalysis / Volume 11 / Issue S02 / August 2005
- Published online by Cambridge University Press:
- 01 August 2005, pp. 564-565
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- August 2005
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Variable Magnification Electron Holography for 2-D Mapping of Semiconductor Devices
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- Journal:
- Microscopy Today / Volume 12 / Issue 6 / November 2004
- Published online by Cambridge University Press:
- 14 March 2018, pp. 20-25
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- November 2004
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