Skip to main content Accessibility help
×
Home
Hostname: page-component-768ffcd9cc-jp8mt Total loading time: 0.31 Render date: 2022-12-01T21:24:39.617Z Has data issue: true Feature Flags: { "useRatesEcommerce": false } hasContentIssue true

Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

J. Li
Affiliation:
IBM Research, Albany, NY, USA
H. Niimi
Affiliation:
GLOBALFOUNDRIES, Albany, NY, USA
O. Gluschenkov
Affiliation:
IBM Research, Albany, NY, USA
P. Adusumilli
Affiliation:
IBM Research, Albany, NY, USA
J. Fronheiser
Affiliation:
GLOBALFOUNDRIES, Albany, NY, USA
S. Mochizuki
Affiliation:
IBM Research, Albany, NY, USA
Z. Liu
Affiliation:
IBM Research, Albany, NY, USA
V. Kamineni
Affiliation:
GLOBALFOUNDRIES, Albany, NY, USA
M. Raymond
Affiliation:
GLOBALFOUNDRIES, Albany, NY, USA
A. V Carr
Affiliation:
IBM Research, Albany, NY, USA
T. Yamashita
Affiliation:
IBM Research, Albany, NY, USA
B. Veeraraghavan
Affiliation:
IBM Research, Albany, NY, USA
N. Saulnier
Affiliation:
IBM Research, Albany, NY, USA
J. Gaudiello
Affiliation:
IBM Research, Albany, NY, USA
Rights & Permissions[Opens in a new window]

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Niimi, H., et al, IEEE Electron Device Letters 2016 1371.CrossRefGoogle Scholar
[2] Gluschenkov, O., et al, IEEE IEDM Technical Digest 2016 448.Google Scholar
[3] Kamineni, V., et al, IEEE IITC/AMC 2016 105.Google Scholar
[4] Xie, R., et al, IEEE IEDM Technical Digest 2016 47.Google Scholar
[5] Narasimha, S., et al, IEEE IEDM Technical Digest 2017 689.Google Scholar
[6] Auth, C., et al, IEEE IEDM Technical Digest 2017 673.Google Scholar
[7] This work was performed by the Research Alliance teams at various IBM Research and Development Facilities.Google Scholar
You have Access

Save article to Kindle

To save this article to your Kindle, first ensure coreplatform@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about saving to your Kindle.

Note you can select to save to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be saved to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
Available formats
×

Save article to Dropbox

To save this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Dropbox account. Find out more about saving content to Dropbox.

Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
Available formats
×

Save article to Google Drive

To save this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you used this feature, you will be asked to authorise Cambridge Core to connect with your Google Drive account. Find out more about saving content to Google Drive.

Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
Available formats
×
×

Reply to: Submit a response

Please enter your response.

Your details

Please enter a valid email address.

Conflicting interests

Do you have any conflicting interests? *