3 results
Optimizing Stressor Film Deposition Sequence in Polish Rate Order for Best Planarization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1335 / 2011
- Published online by Cambridge University Press:
- 23 June 2011, mrss11-1335-o03-01
- Print publication:
- 2011
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High Temperature Plasma Etching of PZT Capacitor Stacks for High Density FERAMs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 748 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, U1.7
- Print publication:
- 2002
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Preparation of superconducting YBa2Cu4O8 by the sol-gel method
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- Journal:
- Journal of Materials Research / Volume 7 / Issue 9 / September 1992
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2355-2359
- Print publication:
- September 1992
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