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Influence of Processing Conditions on Mechanical and Structural Properties of DLC Produced by FIB-CVD Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1297 / 2011
- Published online by Cambridge University Press:
- 21 March 2011, mrsf10-1297-p10-28
- Print publication:
- 2011
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- Article
- Export citation