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Influence of Processing Conditions on Mechanical and Structural Properties of DLC Produced by FIB-CVD Method

Published online by Cambridge University Press:  21 March 2011

Naomichi Sakamoto ,
Yusai Akita ,
Hiroyuki Harada ,
Takuya Yasuno  and
Yasuo Kogo
Naomichi Sakamoto
Affiliation:
Department of Science and Engineering, Iwaki Meisei University, 5-5-1 Chuodai-Iino Iwaki, Fukushima, Japan
Yusai Akita
Affiliation:
Department of Materials Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda 278-8510, Japan
Hiroyuki Harada
Affiliation:
Department of Materials Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda 278-8510, Japan
Takuya Yasuno
Affiliation:
Department of Science and Engineering, Iwaki Meisei University, 5-5-1 Chuodai-Iino Iwaki, Fukushima, Japan
Yasuo Kogo
Affiliation:
Department of Materials Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda 278-8510, Japan
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Abstract

Influence of processing condition on mechanical and structural properties of diamond-like carbon (DLC) by focused ion-beam chemical vapor deposition (FIB-CVD) method was investigated. The DLC specimens were produced under conditions of varying supplied amount of material gas and probe current of FIB. Volume determination results of DLC structures indicated that a deposition rate was increased with both the amount of gas and the probe current. To evaluation of mechanical property, indentation hardness was measured by a nano-indentation tester. From evaluation of mechanical property, it was found that the indentation hardness was sensitive to the processing condition, showing in the range of 8-13 GPa. The hardness of DLC structures was seemed to be lower when etching process higher contributed for formation process. Crystallographic structure of DLC remained amorphous even though the mechanical properties varied widely. Results of hydrogen concentration measurement indicated that increase of hydrogen concentration might lead to decrease of hardness.

Keywords

amorphousCion-beam assisted deposition
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1297: Symposium P – Deformation Mechanisms, Microstructure Evolution and Mechanical Properties of Nanoscale Materials , 2011 , mrsf10-1297-p10-28
Copyright
Copyright © Materials Research Society 2011

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References

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