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FIB-Based Fatigue Testing of Silicon Nitride Thin Films for Space Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 851 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, NN5.16
- Print publication:
- 2004
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- Article
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Characterization of Mechanical Properties of Silicon Nitride Thin Films for Space Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 782 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A5.21
- Print publication:
- 2003
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- Article
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