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Thin Oxynitride Films Prepared by Low Pressure Rapid Thermal Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 43
- Print publication:
- 1993
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- Article
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Exploration of Amorphous Silicon Thin Film Transistor Degradation with Thermal Anneal
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- Journal:
- MRS Online Proceedings Library Archive / Volume 297 / 1993
- Published online by Cambridge University Press:
- 01 January 1993, 895
- Print publication:
- 1993
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- Article
- Export citation