2 results
Evaluation of Inhibitors for ECMP of Copper Using Electrochemical Quartz Crystal Microbalance (EQCM) Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F12-09
- Print publication:
- 2006
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Etching of Zirconium Oxide, Hafnium Oxide, and Hafnium Silicates in Dilute Hydrofluoric Acid Solutions
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- Journal:
- Journal of Materials Research / Volume 19 / Issue 4 / April 2004
- Published online by Cambridge University Press:
- 03 March 2011, pp. 1149-1156
- Print publication:
- April 2004
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- Article
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