9 results
Composition Quantification of Microelectronics Multilayer Thin Films by EDX: Toward Small Scale Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1184 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1184-HH08-08
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- 2009
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Backside Analysis of Ultra-Thin Film Stacks in Microelectronics Technology Using X-ray Photoelectron Spectroscopy
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1184 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1184-HH08-04
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- 2009
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Growth and Layer Characterization of SrTiO3 by Atomic Layer Deposition using Sr(tBu3Cp)2 and Ti(OMe)4
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1155 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1155-C08-03
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- 2009
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Physico-chemical Characterization of Thin Oxide Films: Difficulties and Solutions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1073 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1073-H05-01
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- 2008
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Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films
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- Journal:
- Journal of Materials Research / Volume 22 / Issue 12 / December 2007
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3484-3493
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- December 2007
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Surface Preparation Techniques for the Atomic Layer Deposition of Hafnium Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 917 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0917-E10-05
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- 2006
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Correlation of Phase Segregation and Electrical Properties of Low-Power MOSFETs with Hf-based Silicate Gate Dielectric Layers and TaN Metal Gates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 917 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0917-E07-04
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- 2006
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Screening the High-k Layer Quality by Means of Open Circuit Potential Analysis and Wet Chemical Etching
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- Journal:
- MRS Online Proceedings Library Archive / Volume 745 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, N1.8
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- 2002
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Segregation of Cu on Etched and Non-Etched Al(Cu) Surface
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- Journal:
- MRS Online Proceedings Library Archive / Volume 516 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 77
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- January 1998
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