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Stress-Temperature Behavior of O3-TEOS Sub-Atmospheric CVD (SACVD) Oxide Films Deposited on Various Oxide Underlayers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 308 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 77
- Print publication:
- 1993
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- Article
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