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Effect of Non-equilibrium Pulsed Ejection of Si Species into Background Gas on the Formation of Si Nanocrystallite and Nanocrystal-film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1305 / 2011
- Published online by Cambridge University Press:
- 26 January 2011, mrsf10-1305-aa17-36
- Print publication:
- 2011
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- Article
- Export citation