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Nanocrystalline ZrO2 thin films on silicon fabricated by pulsed-pressure metalorganic chemical vapor deposition (PP-MOCVD)
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- Journal:
- Journal of Materials Research / Volume 23 / Issue 8 / August 2008
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2202-2211
- Print publication:
- August 2008
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- Article
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