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Dual-beam Focused Ion Beam: A Multifunctional Tool for Nanotechnology
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- Journal:
- Microscopy and Microanalysis / Volume 8 / Issue S02 / August 2002
- Published online by Cambridge University Press:
- 01 November 2002, pp. 56-57
- Print publication:
- August 2002
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Plasticity Length Scale in LIGA Nickel MEMS Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B2.5
- Print publication:
- 2001
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Mechanisms of Fatigue in Polysilicon Mems Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B2.3
- Print publication:
- 2001
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On the Evolution of Surface Morphology of Polysilicon Mems Structures During Fatigue
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- Journal:
- MRS Online Proceedings Library Archive / Volume 657 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, EE2.3
- Print publication:
- 2000
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