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Improved structural and electrical properties of thin ZnO:Al films by dc filtered cathodic arc deposition
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- Journal:
- Journal of Materials Research / Volume 27 / Issue 5 / 14 March 2012
- Published online by Cambridge University Press:
- 07 November 2011, pp. 857-862
- Print publication:
- 14 March 2012
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- Article
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High Rate Deposition of High Quality ZnO:Al by Filtered Cathodic Arc
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1315 / 2011
- Published online by Cambridge University Press:
- 16 August 2011, mrsf10-1315-mm03-25
- Print publication:
- 2011
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- Article
- Export citation