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Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1321 / 2011
- Published online by Cambridge University Press:
- 27 June 2011, mrss11-1321-a06-01
- Print publication:
- 2011
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- Article
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