1 results
Characterization of Sputter Deposited Al-Nitride And Al-Oxide by X-Ray Photoelectron Loss Spectroscopy
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 60 / 1985
- Published online by Cambridge University Press:
- 28 February 2011, 379
- Print publication:
- 1985
-
- Article
- Export citation