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Tantalum Pentoxide for Advanced DRAM Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 299
- Print publication:
- 1996
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- Article
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Deposition, Annealing, and Characterization of Tantalum Pentoxide Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 282 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 557
- Print publication:
- 1992
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- Article
- Export citation