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The Surface Damage in SiO2 Caused by Chemical Mechanical Polishing on Ic-60 Pads
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 157
- Print publication:
- 1994
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- Article
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Basic Science in Silica Glass Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 89
- Print publication:
- 1994
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- Article
- Export citation