1 results
Correlation of indentation-induced phase transformations with the degree of relaxation of ion-implanted amorphous silicon
-
- Journal:
- Journal of Materials Research / Volume 28 / Issue 8 / 28 April 2013
- Published online by Cambridge University Press:
- 26 March 2013, pp. 1056-1060
- Print publication:
- 28 April 2013
-
- Article
- Export citation