12 results
A Comparison of Grain Size Measurements in Al-Cu Thin Films: Imaging Vs. Diffraction Techniques
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- Journal:
- Microscopy Today / Volume 10 / Issue 6 / November 2002
- Published online by Cambridge University Press:
- 14 March 2018, pp. 5-9
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- November 2002
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A Comparison of Grain Size Measurements in Al-Cu Thin Films: Imaging verses Diffraction Techniques
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- Journal:
- Microscopy and Microanalysis / Volume 8 / Issue S02 / August 2002
- Published online by Cambridge University Press:
- 01 August 2002, pp. 672-673
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- August 2002
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Crystallographic Texture and Phase Metrology During Damascene Copper Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 721 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, J1.1
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- 2002
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Characteristics of low-k and ultralow-k PECVD deposited SiCOH films.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B12.3
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- 2002
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Texture Evolution in Al(Cu) Interconnect Materials
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- Journal:
- MRS Online Proceedings Library Archive / Volume 672 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, O6.8
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- 2001
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In-Plane Crystallographic Texture of Bcc Metal thin films on Amorphous Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 472 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 27
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- 1997
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Manufacturability Versus Reliability Issues Relevant to Interconnect Metallizations.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 59
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- 1994
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Correlation of the Stress-Temperature History with Microstructure in A1-0.5Cu and A1-0.15Pd Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 356 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 447
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- 1994
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Effect of Line Width on Electromigration of Textured Pure Aluminum Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 309 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 345
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- 1993
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Grain Growth in Al-(Cu, Pd, Nb) Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 309 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 395
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- 1993
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The Effect of Annealing on the Cu Distribution and AI2Cu Precipitation in Ai(Cu) Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 309 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 423
- Print publication:
- 1993
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Electromigration Damage in Fine Al Alloy Lines due To Interfacial Diffusion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 309 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 111
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- 1993
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