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Moisture uptake and dielectric property of methylsilsesquioxane/high-temperature porogen hybrids and porous low-k films
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- Journal:
- Journal of Materials Research / Volume 26 / Issue 23 / 14 December 2011
- Published online by Cambridge University Press:
- 23 November 2011, pp. 2987-2995
- Print publication:
- 14 December 2011
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- Article
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