2 results
“In situ” XPS studies of laser-induced surface nitridation and oxidation of tantalum
-
- Journal:
- Journal of Materials Research / Volume 30 / Issue 19 / 14 October 2015
- Published online by Cambridge University Press:
- 14 July 2015, pp. 2967-2976
- Print publication:
- 14 October 2015
-
- Article
- Export citation
Thermal Stability of Ru Gate Electrode on HfSiO Dielectric
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 917 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0917-E05-02
- Print publication:
- 2006
-
- Article
- Export citation