2 results
Optimizing Stressor Film Deposition Sequence in Polish Rate Order for Best Planarization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1335 / 2011
- Published online by Cambridge University Press:
- 23 June 2011, mrss11-1335-o03-01
- Print publication:
- 2011
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- Article
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A Novel High-Stress Pre-Metal Dielectric Film to Improve Device Performance for sub-65nm CMOS Manufacturing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 913 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0913-D02-01
- Print publication:
- 2006
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- Article
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