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Formation and Thermal Stability of End-of-Range Defects in Ge Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 167
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- 1993
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Formation of Extrinsic Defects at the Amorphouscrystalline Interface in Ion-Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 319 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 189
- Print publication:
- 1993
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Formation of End-of-Range Defects in Silicon at Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 26 February 2011, 1103
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- 1992
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