1 results
Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
-
- Journal:
- Journal of Materials Research / Volume 19 / Issue 11 / November 2004
- Published online by Cambridge University Press:
- 01 November 2004, pp. 3224-3233
- Print publication:
- November 2004
-
- Article
- Export citation