2 results
Nitrogen Implantation and Diffusion in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 568 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 277
- Print publication:
- 1999
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- Article
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The Effects of Implanted Nitrogen on Diffusion of Boron and Evolution of Extended Defects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 469 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 425
- Print publication:
- 1997
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- Article
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