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The Fabrication of Complex Membrane Structures in N-GaAs for Micromechanical Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 853
- Print publication:
- 1995
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Improved Adhesion of P-doped SiO2-Interface Layers on InP by Low-Temperature Damage-Free Plasma-CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 318 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 231
- Print publication:
- 1993
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- Article
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