2 results
Growth of Amorphous and Crystalline Silicon by HR-CVD (Hydrogen Radical Enhanced CVD)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 95 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 225
- Print publication:
- 1987
-
- Article
- Export citation
Reactive Deposition of a-Silicon and Si-Based Alloys
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 70 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 807
- Print publication:
- 1986
-
- Article
- Export citation