4 results
Chemical vapor deposition of titanium nitride thin films from tetrakis(dimethylamido)titanium and hydrazine as a coreactant
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- Journal:
- Journal of Materials Research / Volume 15 / Issue 11 / November 2000
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2414-2424
- Print publication:
- November 2000
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Low Temperature Chemical Vapor Deposition of Titanium Nitride Thin Films With Hydrazine and Tetrakis-(dimethylamide)Titanium
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- Journal:
- MRS Online Proceedings Library Archive / Volume 606 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 91
- Print publication:
- 1999
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Molecular Beam Mass Spectrometry Studies of the Thermal Decomposition of Tetrakis(dimethylamino)Titanium
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- Journal:
- MRS Online Proceedings Library Archive / Volume 606 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 103
- Print publication:
- 1999
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Aspects of Gas Phase Chemistry During Chemical Vapor Deposition of Ti-Si-N Thin Films With Ti(NMe2)4 (TDMAT), NH3, and SiH4
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- Journal:
- MRS Online Proceedings Library Archive / Volume 606 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 97
- Print publication:
- 1999
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