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Atomic force microscopy study of the role of molecular weight of poly(acrylic acid) in chemical mechanical planarization for shallow trench isolation
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- Journal:
- Journal of Materials Research / Volume 21 / Issue 2 / February 2006
- Published online by Cambridge University Press:
- 01 February 2006, pp. 473-479
- Print publication:
- February 2006
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- Article
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