3 results
Real-time Control System for Improved CMP Pad Profiles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-E02-02
- Print publication:
- 2010
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- Article
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Removal Rate, Uniformity and Defectivity Studies of Chemical Mechanical Polishing of BPSG Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 613 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, E8.6.1
- Print publication:
- 2000
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- Article
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A Novel Retaining Ring in Advanced Polishing Head Design for Significantly Improved CMP Performance
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 63
- Print publication:
- 1999
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- Article
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