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Ion Beam Reactive Sputter-Deposition of Silicon and Zirconium Oxides.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 563
- Print publication:
- 1995
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Composition and Structure of Zirconium Nitride Films Produced by Ion Assisted Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 354 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 81
- Print publication:
- 1994
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- Article
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