2 results
Advanced Ion Implantation Technology for High Performance Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 669 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, J1.3
- Print publication:
- 2001
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- Article
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Cryo-Implantation Technology for Controlling Defects and impurity out diffusion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B3.8
- Print publication:
- 2000
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- Article
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