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Materials for Microlithography Edited by L.F. Thompson, C.G. Willson, and J.M.J. Frechet Volume 266 of ACS Symposium Series, American Chemical Society, 1984)
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- Journal:
- MRS Bulletin / Volume 11 / Issue 4 / August 1986
- Published online by Cambridge University Press:
- 29 November 2013, p. 3
- Print publication:
- August 1986
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