Materials for Microlithography Edited by L.F. Thompson, C.G. Willson, and J.M.J. Frechet Volume 266 of ACS Symposium Series, American Chemical Society, 1984)

Arnost Reiser

doi:10.1557/S0883769400069013

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Materials for Microlithography Edited by L.F. Thompson, C.G. Willson, and J.M.J. Frechet Volume 266 of ACS Symposium Series, American Chemical Society, 1984)

Published online by Cambridge University Press: 29 November 2013

Arnost Reiser

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Type: Book Reviews
Information: MRS Bulletin , Volume 11 , Issue 4 , August 1986 , pp. 3

DOI: https://doi.org/10.1557/S0883769400069013 [Opens in a new window]
Copyright: Copyright © Materials Research Society 1986

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Materials for Microlithography Edited by L.F. Thompson, C.G. Willson, and J.M.J. Frechet Volume 266 of ACS Symposium Series, American Chemical Society, 1984)

Volume 11, Issue 4
Arnost Reiser
DOI: https://doi.org/10.1557/S0883769400069013

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Materials for Microlithography Edited by L.F. Thompson, C.G. Willson, and J.M.J. Frechet Volume 266 of ACS Symposium Series, American Chemical Society, 1984)

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