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Conventional thermal annealing for a more efficient p-type doping of Al+ implanted 4H-SiC
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- Journal:
- Journal of Materials Research / Volume 28 / Issue 1 / 14 January 2013
- Published online by Cambridge University Press:
- 05 July 2012, pp. 17-22
- Print publication:
- 14 January 2013
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- Article
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