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Texture and strain analysis of tungsten films via Tilt-A-Whirl methodology

Published online by Cambridge University Press:  01 August 2022

Mark A. Rodriguez Open the ORCID record for Mark A. Rodriguez [Opens in a new window] ,
Jamin Pillars ,
Nichole R. Valdez ,
James J. M. Griego ,
Matthew V. Gallegos ,
John A. Krukar ,
Andrew Polonsky  and
Steven L. Wolfley
Mark A. Rodriguez*
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Jamin Pillars
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Nichole R. Valdez
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
James J. M. Griego
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Matthew V. Gallegos
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
John A. Krukar
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Andrew Polonsky
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
Steven L. Wolfley
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-1411, USA
*
a)Author to whom correspondence should be addressed. Electronic mail: marodri@sandia.gov
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Abstract

Tungsten (W) films have many applications in the semiconducting industry for sensor technology. Deposition conditions can significantly impact the resulting W films in terms of the phases present (α-BCC or β-A12), microstructural grain orientation (texture), and residual strain. Tilt-A-Whirl methodology has been employed for the evaluation of a W film showing both texture and residual strain. Sin2(ψ) analysis of the film was performed to quantify the strongly tensile in-plane strain (+0.476%) with an estimated in-plane tensile stress of ~1.9 GPa. The 3D dataset was also evaluated qualitatively via 3D visualization. Visualization of 3D texture/strain data poses challenges due to peak broadening resulting from defocusing of the beam at high ψ tilt angles. To address this issue, principal component analysis (PCA) was employed to diagnose, model, and remove the broadening component from the diffraction data. Evaluation of the raw data and subsequent corrected data (after removal of defocusing effects) has been performed through projection of the data into a virtual 3D environment (via CAD2VR software) to qualitatively detect the impact of residual strain on the observed pole figure.

Keywords

strain analysistungsten filmsTilt-A-Whirl methodology
Type
Proceedings Paper
Information
Powder Diffraction , Volume 37 , Issue 2 , June 2022 , pp. 52 - 61
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Copyright
Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of International Centre for Diffraction Data

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