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F-65 Assessment of Advanced X-ray GIXRF Methodology Applied to the Characterization of Ultra Shallow Junctions

Published online by Cambridge University Press:  20 May 2016

P. Hönicke ,
B. Beckhoff ,
M. Kolbe ,
D. Giuberton ,
G. Pepponi  and
J. van den Berg
P. Hönicke
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany
B. Beckhoff
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany
M. Kolbe
Affiliation:
Physikalisch-Technische Bundesanstalt, Berlin, Germany
D. Giuberton
Affiliation:
Fondazione Bruno Kessler, Trento, Italy
G. Pepponi
Affiliation:
Fondazione Bruno Kessler, Trento, Italy
J. van den Berg
Affiliation:
University of Salford, Salford, UK
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 25 , Issue 2 , June 2010 , pp. 221
Copyright
Copyright © Cambridge University Press 2010

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