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F-15 Characterizing Hafnium Silicate Gate Dielectrics with a Total Reflection X-ray Fluorescence Spectrometer

Published online by Cambridge University Press:  20 May 2016

C. Sparks ,
P. Lysaght  and
T. Rhoad
C. Sparks
Affiliation:
International SEMATECH, Austin, TX
P. Lysaght
Affiliation:
International SEMATECH, Austin, TX
T. Rhoad
Affiliation:
International SEMATECH, Austin, TX
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Abstract

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Type
Denver X-Ray Conference
Information
Powder Diffraction , Volume 19 , Issue 2 , June 2004 , pp. 202
Copyright
Copyright © Cambridge University Press 2004

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